Tantalum target
uniform grain size, and very good straightness.Shenzhen Sunrise Metal Industry Co.,Ltd 深圳市东升稀有金属有限公司
skype :Li.mary9
QQ : 1957953030
Tantalum target, Tantalum sputtering targets, Tantalum- tungsten Alloy targets
Material:RO5200， RO5400， RO5252(Ta-2.5W)， RO5255(Ta-10W)
Size: circular targets:Diameter 15mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets:Thickness 1mm up to 40mm x Width up to 1000mm x Length up to 3000mm
Table 1: technology parameter
Size: circular targets:Diameter 15mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets:Thickness 1mm up to 40mm x Width up to 1000mm x Length up to 3000mm
Table 1: technology parameter
Grade
|
3N， 3N5， 4N， with Ta 99.99％min
|
Recrystallization
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95％min
|
Grain size
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ASTM 4 or finer
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Surface finish
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16Rms max. or Ra 0.4 ( RMS64 or better)
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Flatness
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0.1mm or 0.15％ max
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Tolerance
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+/-0.010" on all dimensions
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Table 1. Chemical composition:
Tantalum targetUsing Tantalum target (Tantalum sputtering targets) in Machinery and Chemical Processing.
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